At present, the dry vacuum pump is still in its infancy in China, and domestic substitution for import will become a trend in the future. Dry vacuum pump will have a great effect on the yield of the process. It is also a trend for dry pump to replace the existing water pump and oil pump. During the maintenance of the vacuum pump, it is found that the pump is full of water. Under normal circumstances, the pump should be oil. While vacuumizing, the pump also pumps water into the pump, resulting in a large number of oil-water compounds. When the pump is working, the presence of a large amount of water increases the load of the pump, and the pump will have problems in the long run. The vacuum drying oven has requirements for the materials to be dried. One is that it cannot contain a large amount of water, and the other is that it cannot contain organic compounds. They will be pumped into the body while vacuumizing, resulting in a series of adverse reactions and affecting the service life of the pump. If the material contains water or organic solvent, liquid water filter and condenser must be added to play a filtering role. While using the vacuum drying oven, we must also strengthen the maintenance of the vacuum pump, timely change the oil for the vacuum pump and prolong its service life.